After following this course, the student:
- Students have a comprehensive overview of different microfabrication methods and name advantages / disadvantages.
- Students can choose the most suitable microfabrication method for a given application.
- Students can explain the underlying design principles and scientific background for the different technological applications of microfabrication methods.
- Students can apply the knowledge to the design of a micro-device.
- Students have acquired the practical skills necessary for creating and testing of micro-devices.
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Period (from – till): Quartiles 1 and 4, time slot B
Faculty
responsible lecturer: prof.dr.ir. J.M.J. den Toonder
co-lecturer: dr. R. Luttge
instructors: ir. F.G.A. Homburg, S. Sahebali MSc,
Information: Secr. Microsystems - GEM-Z 3.132 - 5706
prof.dr.ir. J.M.J. den Toonder - GEM-Z 3.130 – 2987
Description of content
PLEASE NOTE THAT THIS COURSE IS TAUGHT IN EINDHOVEN.
Advanced products such as mobile phones and modern (bio-) medical devices are manufactured using special, modern technologies. These micro-fabrication methods make it possible to structure and combine materials on a (sub) micrometer scale. Knowledge and experience with these methods is essential for the advanced manufacturing industry, e.g. at companies like ASML, NXP, Philips, but also many small companies developing sensors, actuators, and other advanced components and devices. In this course, you will learn about the most important methods; the principles, advantages, and disadvantages, will be explained. As part of the course, you will design, make, and test a device yourself in the TU/e Microfab Lab.
Topics:
•scaling and mamufacturing thin film deposition
•lithography, etching
•soft lithography
•micro molding techniques
•additive manufacturing, 3D printing
•mechanical machining methods
•laser microfabrication with various lasertypes and materials
•applications
•practical sessions: design, fabricate, and test a microsystem
Literature/study material used:
Syllabus
Slides from lectures
Instructions for practical sessions
Selected review articles
Registration:
register in Eindhoven. Due to limitations regarding the practical sessions, enrolment in the course is limited to a maximum of 30 students. Also register in Osiris
Mandatory for students in own Master’s programme:
No.
Optional for students in other GSLS Master’s programme:
No.
Prerequisite knowledge:
For this course no specific prior knowledge is required
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